【作者】 赵青南； 赵修建；

【Author】 ZHAO Qing-nan;ZHAO Xiu-jian The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, Wuhan University of Technology,Wuhan, 430070, China Cener for Materials Research and Analysis, Wuhan University of Technology Wuhan, 430070, China

【机构】 武汉理工大学硅酸盐材料工程教育部重点实验室；

【摘要】 用三靶直流反应磁控溅射仪,通过改变玻璃基片温度（35～500℃）,在浮法玻璃上镀膜,制备了玻璃/TiO₂/TiN/TiO₂阳光控制镀膜玻璃.用Beckman UV 5240光谱仪和X射线光电子能谱仪（XPS）对试样的光谱特性和膜表面组成与结构进行了分析.结果表明,当基片温度达500℃时,试样的红外反射率下降.在氧气氛下提高基片温度至400℃,TiN薄膜上开始有TiN_xO_y层生成.讨论了影响TiO₂/TiN/TiO₂阳光控制镀膜玻璃光学性能的原因.更多还原

【Abstract】 Transparent TiO₂/TiN/TiO₂ multi-layer solar control coatings were deposited on normal soda-lime-silicafloat glass substrate by using d.c. reactive magnetron sputtering at substrate temperature ranging from 350 to 500℃.The optical properties of the coatings and the coating composition were studied by Beckman UV 5240 and X-rayphotoelectron spectroscopy （XPS）, respectively. The results of the optical properties showed that when the substratetemperature was at 500℃, the infrared reflectance greatly decreased. The XPS results showed that when the substratetemperature was higher than 400℃ in oxygen atmosphere, the formation of thin surface over-layers （TiN_xO_y） on top ofthe TiN films was observed. The effect of some factors on the TiO₂/TiN/TiO₂ multi-layer solar control coatings wasdiscussed.更多还原