【作者】 于涛； 王东生； 吴迪； 李爱东； 夏奕东； 胡安； 刘治国； 闵乃本；

【Author】 YU Tao;WANG Dong-Sheng;WU Di;LI Ai-dong;XIA Yi-dong;HU An;LIU Zhi-Guo;MING Nai-ben National Laboratory of Solid State Microstructures, Nanjing University Nanjing, 210093, China

【机构】 南京大学固体微结构物理国家重点实验室；

【摘要】 利用RT66A标准铁电测试仪,系统地研究了在氮氢混合气氛中退火前后,以及氧气恢复性退火前后SrBi₂O₉（SBT）铁电薄膜的疲劳特性的变化。在疲劳特性测量中发现,当外加电压为6V和8V时,对于经过氮氢混合气氛退火的SBT薄膜,其归一化非挥发的剩余极化dP的值会随着极化反转的次数增加而逐渐增大,而在来经氮氢混合气氛退火处理的SBT薄膜上未观察到此现象。这个结果说明,经过氮氢混合气氛退火,在SBT薄膜内部形成了大量的弱的铁电畴的钉扎中心,同时,通过在氧气中的恢复性退火实验证实了,这种钉扎中心的起源是SBT薄膜中的氧空位。更多还原

【Abstract】 The systematic study on the fatigue properties of SrBi₂Ta₂O₉（SBT） thin films annealed in forming gas andrecovered in oxygen anneal were carried out with a RT66A standardized ferroelectric tester. In our fatiguemeasurements on forming gas annealed SBT thin films, the normalized nonvolatile polarization dP value increasedgradually when the applied voltage was 6V and 8V This phenomenon could not be observed obviously in the fatiguemeasurement on the no forming gas processed SBT thin films. Our results indicated that more weak pinning centers ofdomain formed in SBT after forming gas anneal. These pinning centers were probably the oxygen vacancies and couldbe recovered by oxygen anneal at 600℃ or higher temperature.更多还原