【作者】 廖克俊； 王万录； 王蜀霞； 许杰；

【Author】 LIAO Ke-jun;WANG Wan-lu;WANG Shu-xia;XU Jie Department of Applied Physics, Chongqing University, Chongqing, 400044, China

【机构】 重庆大学应用物理系；

【摘要】 本文主要研究了c-BN 膜的光学性质及其应用。c-BN 膜是利用热灯丝射频等离子体CVD 法制备的。薄膜用扫描电子显微镜,红外光吸收谱和紫外光透射谱分析和表征。分析表明,膜中c-BN含量与沉积条件密切有关。利用c-BN 膜设计制造了一种紫外光探测器。更多还原

【Abstract】 In this paper, the optical properties and applications of c-BN films were investigated. c-BN films wereprepared by hot filament and RF plasma CVD. The films obtained were characterized by scanning electron microscopy,Infrared obsorption and UV transmission spectrum. The analysis results showed that the c-BN content in the filmsclosely depended on the deposition conditions. The UV photodetector device was fabricated using c-BN films. Theexperimental results showed that the quality of c-BN films has a important effect on the characteristics of the devices.更多还原