【作者】 沈森祖； 张明虎；

【Author】 SHEN Sen-zu, ZHANG Ming-hu Wuhan Digital Engineering Institute, Wuhan, China, 430074

【机构】 武汉数字工程研究所；

【摘要】 微电子参量的数值校准,和微电子参量的定量描述或精确测量都是同一含义。对于直流参量,数值校准比较容易。对于交流量,其难度随系统不同而不同。本文主要介绍了对交流参的数值校准的一般方法和注意的事项,包括对交直参量不确定度评定的一般计算规则。更多还原

【Abstract】 The numerical value calibration of microelectronic parameters has the same meanings as fixed-quantity characterization or precise measurement of micro-electronics parameters. The numerical value calibration of DC parameters is relatively easy, but for the numerical value calibration of AC parameters, its difficulty is different with system. This paper mainly introduces common methods and notices about numerical value calibration of AC parameters, as well as common calculation rules for the evaluation of uncertainty degree of DC/AC parameters.更多还原