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非平衡磁控溅射CrMoN涂层性能研究
Study on Properties of Unbalanced Magnetron Sputtered CrMoN Coatings
【机构】 上海大学材料科学与工程学院;
【摘要】 在不同Mo靶偏流下采用非平衡闭合场磁控溅射方法在Cr12MoV冷作模具钢表面制备CrMON涂层,通过XRD、EDX、显微硬度、划痕和磨损试验综合分析涂层相结构和的表面性能。实验结果表明,不同工艺下的CrMoN涂层表面光滑、致密,(Cr,Mo)N在(111)晶面呈现最强衍射峰。涂层与基体均具有良好的界面结合。Cr12MoV经PVD处理后,表面承载能力和耐磨性得到了明显的提高。当Mo含量为22.8%时,12h试样磨损体积仅为未处理试样的9.5%。
【Abstract】 CrMoN coatings were prepared on Cr12MoV steel using a closed field unbalanced magnetron sputtering technique with different Mo bias current.The coated surface properties were characterized by XRD,EDX,microhardness,scratch and wear tests.The experimental results show the CrMoN coatings with different Mo bias -current were found to be smooth and with high density,while its crystal structure exhibited a strong (111) peak.The coatings had a good adhesion to the substrate and the surface microhardness as well as wear resistance of Crl2MoV steel were significantly improved by the PVD coatings.The wear volume of CrMoN coatings with 22.8 at% Mo was only 9.5% that of untreated specimen after 12 hours abrasion.
【Key words】 Cr12MoV; unbalanced magnetron sputtering; CrMoN coatings; wear;
- 【会议录名称】 第七届全国表面工程学术会议暨第二届表面工程青年学术论坛论文集(二)
- 【会议名称】第七届全国表面工程学术会议暨第二届表面工程青年学术论坛
- 【会议时间】2008-10
- 【会议地点】中国湖北武汉
- 【分类号】TG174.44
- 【主办单位】中国机械工程学会表面工程分会