节点文献

提拉法制备耐刮擦SiO2减反膜

Scratch-resistant SiO2 Antireflective Coatings Prepared by Dip Coating Method

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 沈军谢志勇欧阳玲邬镝罗爱云王生钊王晓栋

【Author】 SHEN Jun , XIE Zhi-yong, OUYANG Ling, WU Di, LUO Ai-yun , WANG Sheng-zhao, WANG Xiao-dong (Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China)

【机构】 同济大学波耳固体物理研究所

【摘要】 以正硅酸乙酯(TEOS)为原料,采用碱/酸两步催化法制备出SiO2溶胶,在未钢化的玻璃表面经提拉法制备 SiO2薄膜,利用玻璃的钢化过程对薄膜进行热处理。使用场发射扫描电子显微镜、原子力显微镜、椭偏仪、傅立叶红外光谱、分光光度计等分析了薄膜的特性。实验结果表明经过玻璃的钢化后,薄膜反射率峰值为0.17%,在400-800nm的波长范围内平均反射率较镀膜前下降了5%以上,同时薄膜具有较好的耐刮擦性能。

【Abstract】 The scratch-resistant SiO2 antireflective coatings were prepared by dipping of the glass followed by a thermal curing at 700 ℃ taking place simultaneously with the glass toughening, using the base/acid two-step catalytic sol-gel process with tetraethylorthosilicate (TEOS) as precursor. The coatings were characterized with Scanning Electron Microscope (SEM), Atomic Force Microscopy (AFM), Fourier-transform infrared spectroscopy (FTIR), UV-VIS-NIR spectrophotometer and ellipsometery, respectively. The experimental results show that glass toughening remarkably strengthens the mechanical properties of the coatings. While the coatings still have good optical properties. The average reflectance between 400 run and 800 nm is reduced for more than 5% compared with that of the uncoated glass, and the peak reflectance is below 0.2%.

【基金】 国家自然科学基金重点资助项目(21033040);国家高技术863计划(2002AA84052);上海科委纳米专项(0552nm08);教育部跨世纪优秀人才计划资助项目;上海市重点学科建设资助项目(02SL001);上海市科技攻关计划(055211010).
  • 【会议录名称】 中国硅酸盐学会特种玻璃分会第三届全国特种玻璃会议论文集
  • 【会议名称】中国硅酸盐学会特种玻璃分会第三届全国特种玻璃会议
  • 【会议时间】2007-05
  • 【会议地点】中国湖北武汉
  • 【分类号】TQ171.11
  • 【主办单位】中国硅酸盐学会特种玻璃分会、中国科学院上海光机所
节点文献中: 

本文链接的文献网络图示:

本文的引文网络