【作者】 吕昊； 石邦任； 郭丽君； 刘爱梅；

【Author】 LV Hao1,2, SHI Bang-ren1, GUO Li-jun1, LIU Ai-mei2 (1.Department of Physics,Changchun University of Science and Technology, Jilin Changchun, 130022) (2.Department of Physics,Xiaogan University, Xiaogan, 432000)

【机构】 长春理工大学物理系； 孝感学院物理系；

【摘要】 采用等离子增强型化学汽相沉积和电子束刻蚀相结合方法制备了直径为1-20μm的GaInAsP/InP跑道型环形谐振腔,采用扫面电镜等方法对其进行研究。结果表明:直径为4.5μm、跑道长度为5μm,直径为10.5μm、跑道长度为5μm和直径为19.5μm、跑道长度为3μm的环形谐振腔的自由频谱范围分别为28nm、16nm和9.5nm;随着环形直径的增加,其自由频谱范围减小;在相同的直径下,随着跑道的长度增加,自由频谱范围减小。更多还原

【Abstract】 The GaInAsP/InP racetrack ring resonators having diameter 1-20μm had been fabricated by using of the .plasma enhanced chemical vapor deposition(PECVD) and the electron beam lithography(EBL), the scanning electron microscope(SEM) is used to research on the GaInAsP/InP racetrack ring resonators. Research results indicate:the free spectrum ranges(FSR) are 28nm、16nm 和 9.5nm respectively, which the diameters and lengths of racetrack are 5μm and 10.5μm、10.5μm and 5μm、19.5μm and 3μm; With the diameter increasing, FSR is decreasing; At the same diameter, with the length of racetrack increasing, FSR is decreasing.更多还原