【作者】 路秀琴； 符长波； 周平； 郭继宇； 赵葵； 李淑媛； 刘建成； 倪嵋楠； 隋丽；

【Author】 LU Xiu-qin;FU Chang-bo;ZHOU Ping;GUO Ji-yu;ZHAO Kui;LI Shu-yuan;LIU Jian-cheng;NI Mei-nan;SUI Li China Institute of Atomic Energy, P. O. Box 275-10, Beijing 102413, China

【机构】 中国原子能科学研究院核物理研究所；

【摘要】 利用HI-13串列加速器提供的高品质的¹²⁷I束,采用弹性反冲探测技术对材料表面成分和杂质的深度分布进行了分析。用ΔE-E望远镜探测器同时分析靶材料中从氢至中重的所有元素,其深度分辨为20～30nm。用Q3D磁谱仪及其焦面探测器的高分辨动量分析,得到了纳米量级的深度分辨,此方法具有对纳米厚度的多层薄膜材料进行测试的能力。更多还原

【Abstract】 Atomic concentration profiles of components and contaminants in foils wereobserved with elastic recoil detection analysis technique. High quality heavy ion beam¹²⁷I provided by HI-13 tandem accelerator of CIAE was used for the measurements. Ele-ments from H to medium heavy were simultaneously tneasured by a △E-E（PSD） tele-scope. The depth resolution of 20～30 nm was obtained. A depth resolution of nano-meter level was achieved at the surface of thin foils by a Q3D magnetic spectrometer andthe focal plane detector with its momentum analysis. The developed technique is usefulin the measurements of multi-layers films with the thickness of nanometer.更多还原