【作者】 陆胜天； 李萍； 刘诗嘉； 朱龙源； 龚海梅；

【Author】 LU Sheng-tian, LI Ping, LIU Shi-jia, ZHU Long-yuan, GONG Hai-mei(State Key Lab. of Transducer Technology, Shanghai Institute of Technical Physics,Chinese Academy of Sciences, Shanghai 200083, CHN)

【机构】 中国科学院上海技术物理所传感技术国家重点实验室；

【摘要】 采用小电流腐蚀、脉冲电流钝化、恒压退火的分步式阳极氧化钝化新方法对碲镉汞红外探测器进行表面钝化,利用扫描电镜(SEM)、俄歇电子能谱(AES)对传统恒流方法和新方法生成的两种阳极氧化膜进行测试比较。结果表明,新方法生长的阳极氧化膜的质量得到了明显改善。并对新方法工艺条件进行了研究,获得了能提高成膜质量的工艺参数条件。更多还原

【Abstract】 A new anodic oxidation method consisting of such three steps as small constant current electrochemical etching, pulse anodic oxidation and constant voltage annealing are used to passivate the surface of MCT infrared detector. With the help of SEM and AES test instrument, two kinds of films prepared by the traditional method and the new method are compared. The results show that with new method of anodic oxidation, the quality of the oxide film is improved. Each step of the new method is studied. Some optimum process parameters to enhance the film quality are gained.更多还原