【作者】 陈四海； 潘峰； 付小朝； 柯才军； 汪殿民； 向思桦； 赖建军； 易新建；

【Author】 CHEN Si-hai, PAN Feng, FU Xiao-chao, KE Cai-jun, WANG Dian-min, XIANG Si-hua, LAI Jian-jun, YI Xin-jian(Department of Optoelectronic Engineering; The Institute of Microsystems. Huazhong University of Science and Technology, Wuhan 430074, CHN)

【机构】 华中科技大学光电子工程系；

【摘要】 基于MOEMS技术研究了一种用于仿生柔性光学传感器的曲面微透镜的制作方法。首先利用传统的光刻胶热熔工艺制作了平面微透镜阵列,然后利用深刻蚀(ICP)制作了一种硅岛阵列支撑结构,在硅岛上涂覆一层聚酰亚胺,并固化,形成柔性的结构。利用这种技术所制作的微型光学传感器既具有一定的柔性,又具有一定的强度,而且与传统的硅工艺相兼容。更多还原

【Abstract】 Based on micro-opto-electro-mechanical system technology, fabrication of a curved mirolens array for bionic optical sensor is studied. A flat microlens array is fabricated by photoresist thermal reflow method. Then a silicon island array supporting structure is manufactured by deep etching process. Finally a layer of polyimide is spun and cured on the silicon island array. The flexible sensor made by the technology, which is compatible with the traditional silicon machining process, has flexibility and strength in some degree.更多还原