【作者】 孙超； 吴传贵； 张万里； 舒畅；

【Author】 SUN Chao1,WU Chuan-gui1,ZHANG Wan-li1,SHU Chang2(1.State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China;2.Kunming Institute of Physics,Kunming 650217,China)

【机构】 电子科技大学电子薄膜与集成器件国家重点实验室； 昆明物理研究所；

【摘要】 动态红外场景产生器是红外硬件闭环仿真系统的核心部件。提出了一种基于聚酰亚胺绝热层的2×16薄膜结构电阻阵列,并利用表面微机械加工技术完成了器件的制备。详细介绍了器件制备的工艺流程,重点研究了聚酰亚胺涂层胶的图形化工艺。最后,利用FLUKE T50型红外热像仪对器件的性能进行了测试,测试结果表明辐射单元表面的等效黑体辐射温度可以达到400 K,能够满足中、长波红外硬件闭环仿真的需求。更多还原

【Abstract】 Dynamic infrared scene projector(DIRSP) is the key component of the Hardware-in-the-loop(HWIL) simulation system.In this paper,the 2×16 thin film resistor array based on polyimide thermal insulating layer for infrared projection was described,and then fabricated by use of the surface micromachining technology.Process factors of the fabrication aspect,especially the polyimide(PI) patterning technology,were discussed in detail.Test of a sample device was conducted by using the FLUKE T50 IR thermal imager.The results showed that the pixel apparent surface temperature can achieve 400K with relatively low power consumption.The resistor array can provide MWIR,LWIR infrared radiation,and was capable for a IR hardware-in-the-loop simulation system.更多还原