【作者】 杨鹏； 伍凡； 侯溪；

【Author】 YANG Peng1,2,WU Fan1,HOU Xi1(1.Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;2.Graduate school of Chinese Academy of Sciences,Beijing 100049,China)

【机构】 中国科学院光电技术研究所； 中国科学院研究生院；

【摘要】 干涉仪是集光机电算为一体的高灵敏检测仪器,其测量精度容易受到各种因素影响。文中综述了影响斐索干涉仪精度的主要因素,并将其分为数据处理误差、环境因素误差和光机设计及制造误差。主要讨论了相移误差、光源稳定性、量化误差、振动、重力变形、探测系统误差、相干噪声、参考面形误差的影响和可能的抑制与改进方法。更多还原

【Abstract】 Interferometer is a high sensitive instrument integrated optics,machine,electronics with computation,and the accuracy of interferometer will be easily influenced by many factors.An overview of the main influence factors is given,and they are classified as data processing errors,the errors caused by environmental factors and the errors caused by optical and mechanism.We will focus on the effects of phase shift errors,the source stability,quantization error,vibration,the gravity distortion,the error of detection system,coherent noise,the figure error of reference surface and the possible methods of suppression and modification.更多还原