【作者】 郭延龙； 王淑云； 杨雪； 朱孟真； 程勇； 王会升；

【Author】 GUO Yan-long,WANG Shu-yun,YANG Xue,ZHU Meng-zhen,CHENG Yong,WANG Hui-sheng(Opto-Electronics Facility of Wuhan Mechanical Technology College,Wuhan 430075,China)

【机构】 武汉军械士官学校；

【摘要】 掺硅类金刚石(Diamond-like Carbon,DLC)膜可以优化纯类金刚石膜的很多性能。在DLC膜中掺硅不仅可以减小膜的内应力,还可以显著提高附着力、耐磨性、sp3键含量、光学带隙宽度、热稳定性、耐腐蚀性等。对含氢和无氢掺硅DLC膜的进展都进行了概括及分析,对其发展趋势进行了展望。更多还原

【Abstract】 Compared to pure Diamond-like Carbon(DLC)films,Silicon doped DLC films have better performance and a lot of merits.Compare to pure DLC films,Silicon doped DLC films have lower inner stress,better adhesion,heat resistance and wear resistance,more sp3 content,bigger optical band width,better corrupt resistance and so on.The development of non-hydrogened and hydrogened Silicon doped DLC Films are summaried and analyzed,and their develop trends are prophesied.更多还原