【作者】 林晶； 孙智慧； 刘壮；

【Author】 LIN Jing SUN Zhi-hui LIU Zhuang (Harbin Engineering University,Harbin 154001,China)

【机构】 哈尔滨商业大学；

【摘要】 在PET基底上采用射频电源,以纯Al为靶,氧气为反应气体,高纯氩气为等离子体磁控溅射高阻隔性Al_xO_y/PET包装薄膜。用红外光谱(IR)分析表明,氧化铝IR谱的峰值、强度和带宽等有规律的变化与通入的氧气量有关。XPS研究发现O-Al-O伸缩振动频率与镀膜中氧和铝值间的关系是:Al-O伸缩振动峰的波数越高,Al_xO_y中氧原子的含量越高。同时测量薄膜的阻隔性显示:Al_xO_y膜的y值越大阻隔性能越好。更多还原

【Abstract】 Used the radio frequency power in the PET basis,take pure Al as the target,the oxygen to respond the gas,the high pure argon for the sputtering plasma,prepared high-resistance Al_xO_y/PET packing thin film. analyzed with the infrared spectrum(IR) indicated that the aluminum oxide IR spectrum’s peak value,the intensity and the band width and so on orderly change with the passed over oxygen quantity.The XPS research discovered that in the O-Al-O expansion vibration frequency and the coating the oxygen and the aluminum value’s relations are:The Al-O expansion vibration peak’s wave number is higher,in Al_xO_y the oxygen atom content is higher.Simultaneously surveys the thin film the impediment demonstration:Al_xO_y the membrane y value bigger impediment performance is better.更多还原