节点文献
高真空磁控溅射法沉积铀薄膜
Study of uranium thin film prepared by high vacuum magnetron-sputtering method
【作者】 陈秋云; 赖新春; 黄火根; 罗丽珠; 蒋春丽; 谭世勇;
【Author】 CHEN Qiu-yun LAI Xin-chun HUANG Huo-gen LUO Li-zhu JIANG Chun-li TAN Shi-yong (National Key Laboratory for Surface Physics and Chemistry,P.O.Box 718-35,Mianyang,Sichuan,P.R. China)
【机构】 表面物理与化学国家重点实验室;
【摘要】 利用高真空磁控溅射法制备了铀薄膜,通过扫描电子显微镜(SEM)对制得薄膜的表面形貌进行观察,利用X射线光电子能谱仪(XPS)及X射线衍射仪(XRD)对薄膜的表面结构及表面元素状态进行分析和表征。结果表明该法制得的U薄膜比较致密、连续。
【Abstract】 Uranium thin films were prepared by high vacumm magnetron-sputtering method.Surface morphology of U thin films were observed by SEM.The surface structure and element conditions were analysed and characterized by XPS and XRD.The results show that uranium thin films are very dense and continous.
- 【会议录名称】 第九届真空冶金与表面工程学术会议论文摘要集
- 【会议名称】第九届真空冶金与表面工程学术会议
- 【会议时间】2009-08-24
- 【会议地点】中国辽宁沈阳
- 【分类号】TB383.2
- 【主办单位】中国真空学会真空冶金专业委员会(Vacuum Metallurgy Committee of Chinese Vacuum Society)、沈阳市真空学会(ShenYang Vacuum Society)