【作者】 刘艳涛； 马剑平；

【Author】 LIU Yan-tao MA Jian-ping (Xi’an University of Technology Institute of Automation,710048)

【机构】 西安理工大学自动化学院；

【摘要】 介绍应用于石英晶体谐振器制造的双靶真空镀膜机,以Atemga128单片机为核心,与上位机进行数据传递,真空镀膜包括真空获得、电离清洗、磁控溅射等工艺过程,可实现多种金属电极的镀膜要求,并实现谐振器的制造工艺要求。更多还原

【Abstract】 Introduce double-target sputtering vacuum machine,it’used in the manufacturing of quartz crystal, MCU as the core to Atemga128 with the host computer for data transmission,is designed to obtain a vacuum, ionization cleansing,magnetron sputtering process control.The sputtering vacuum machine to achieve a variety of metal electrode manufacture requirements,and the realization of quartz resonator manufacturing process requirements.更多还原