【作者】 蔺增； 王芳； 岳向吉； 张以忱； 巴德纯；

【Author】 LIN Zeng~(a,b) WANG Fang~a YUE Xiang-ji~a ZHANG Yi-chen~a BA De-chun~a (a School of Mechanical Engineering & Automation,Northeastern University,Shenyang 110004,China) (b State Key Laboratory of Plastic Forming Simulation and Die & Mould Technology Wuhan,Hubei,430074, China)

【机构】 东北大学机械工程与自动化学院； 塑性成形模拟及模具技术国家重点实验室；

【摘要】 本文论述了用射频等离子体增强化学气相沉积方法在不锈钢上制备类金刚石碳(DLC)膜的工艺及性能。为提高DLC膜与不锈钢的结合力,预先用离子镀方法制备了Ti/TiN/TiC功能涂层作为过渡层。然后,在过渡层上沉积了一定厚度的高质量的DLC薄膜。通过优化沉积参数,所制备的DLC膜与100Cr6钢球对磨时摩擦系数可以达到0.20。用SEM和Raman光谱分析研究了DLC膜的减摩机理和磨损机制,证实了摩擦过程中的石墨化转变在其中发挥着重要作用。从机械和摩擦学应用的角度来看,所制备的DLC膜的良好的抗划擦能力具有重要的应用前景。更多还原

【Abstract】 This paper discusses the application of RFPECVD(Radio Frequency Plasma Enhanced Chemical Vapor Deposition) process to DLC(Diamond-like Carbon) film deposition on stainless steel substrate at room temperature.A Ti/TiN/TiC underlayer with functional gradient was pre-deposited on the substrate to play a role of transition interlayer so as to improve the adhesion strength.Then,the DLC film with a certain thickness was thus deposited successfully on the substrate without delamination.Optimizing the deposition parameters, the friction coefficient between DLC film deposited and 100Cr6 steel ball can be lower than 0.20.The wear mechanism of DLC film in the frictional process was studied by means of SEM and Raman microanalysis.The friction-induced graphitization mechanism of DLC film is confirmed by micro-Raman analysis.The observation of good scratch protection for DLC films is very interesting from the point of view of mechanical and frictional applications.更多还原