【作者】 曾冬梅； 周海； 孙金池； 杨英歌； 冯文然； 万汉城； 卢一民；

【Author】 ZENG Dong-mei~1 ZHOU Hai~1 SUN Jin-chi~2 YANG Ying-ge~1 FENG Wen-ran~1 WAN Han-cheng~1 LU Yi-ming~1 (1 Department of Materials Science and Engineering,Beijing Institute of Petrochemical Technology, Beijing 102617,China;2 Beijing Microelectronic Technology Institute,Beijing 100076,China)

【机构】 北京石油化工学院材料科学与工程系； 北京微电子技术研究所；

【摘要】 选择改进布里奇曼法生长的Cd_0.9Zn_0.1Te晶体为靶材,采用射频磁控溅射法在玻璃衬底上沉积了禁带宽度为1.6～1.7 eV的Cd_1-xZn_xTe多晶薄膜。通过X射线衍射、EDX能谱、台阶仪、原子力显微镜和紫外分光光度计的测试和分析,比较了不同衬底温度对磁控溅射法制备Cd_1-xZn_xTe多晶薄膜光学和结构性能的影响。实验表明:Cd_1-xZn_xTe多晶薄膜的结晶质量和晶粒尺寸随着溅射温度的升高而升高,而薄膜的吸收系数曲线随着溅射温度的升高而下降。更多还原

【Abstract】 Cd_1-xZn_xTe alloy films with 1.6 and 1.7 eV band gaps were deposited on glass as the absorbed layer in solar cells by RF magnetron sputtering from Cd_0.9Zn_0.1Te crystals target grown by the Modified Vertical Bridgman method.High-quality polycrystalline films were obtained.The influences of the deposition temperature on polycrystalline Cd_1-xZn_xTe films have been studied using X-ray diffraction（XRD）,energy dispersive X-ray（EDX）,step profilometer,atomic force microscopy（AFM） and ultraviolet spectrophotometer. We found that the degree of crystallinity and the grain size of the deposited films changed regularly with the increase of deposition temperatures.The optical absorption coefficientαdecreased monotonically with the increase of deposition temperature.更多还原