【作者】 冯焱； 张涤新； 成永军； 卢耀文； 赵澜； 赵光平； 徐婕；

【Author】 Feng Yan,Zhang DiXin,Cheng YongJun,Lu YaoWen,Zhao Lan, Zhao GuangPing,Xu Jie (Lanzhou Institute of Physics,Lanzhou 730000,China)

【机构】 兰州物理研究所；

【摘要】 针对目前正压漏孔校准工作中存在的测量下限指标低、测量不确定度大等问题,提出了正压漏孔校准装置的优化设计方法。采用特殊设计,将定容室的容积减小到10mL以下,降低了气体累计时间,延伸了测量下限。采用主、被动相结合的恒温方法提高恒温精度,使得测量系统温度变化在校准时间内小于0.02K,减小了温度漂移引入的虚流量及测量不确定度。在恒压法正压漏孔校准方法中,提出采用直径小于1mm的精密细活塞及适用的动密封结构,可以将测量下限延伸到10^-7Pa·m³/s量级。通过以上方法,可使正压漏孔校准装置的测量下限优于5×10^-7Pa·m³/s,不确定度小于5%,同时具有较高的工作效率。更多还原

【Abstract】 At present,the works of pressure leak calibration have faced on some problems,such as the index of measurement too low,uncertainties of measurement too large.So the method of optimization design of pressure leak calibration apparatus was approved.Using especially design,this method is favorable to improve the lower limit of flow rate shorter the accumulative time when the interior area of constant volume chamber reduces to 10ml or less. We combined with the active constant temperature method and the passive constant temperature method to improving precision.The temperature of calibration apparatus could be controlled in 0.02k internally in the time range of pressure leak calibration.The uncertainties of measurement and the void flux which because of the temperature fluctuation was decreased.In the constant pressure method,the lower limit of the measurement was extended to 10^{- 7}Pa.m³/s.By using this method,the pressure leak calibration apparatus can make the lower limit come up to 5×10^-7Pa. m³/s,the uncertainties are evaluated to be less than 5%,and at the same time,the working efficiency vary better.更多还原