【作者】 周增林； 惠志林； 李艳； 林晨光； 李景勋； 张美玲； 光伟； 黄浩； 吴春荣； 高陇桥；

【Author】 ZHOU Zeng-lin~1,HUI Zhi-lin~1,LI Yan~1,LIN Chen-guang~1,LI Jing-xun~2,ZHANG Mei-ling~2, GUANG Wei~2,HUANG Hao~3,WU Chun-rong~3,GAO Long-qiao~4 (1.Powder Metallurgy and Special Materials Research Department,General Research Institute for Nonferrous Metals,Beijing 100088,China; 2.Beijing Luxing Hongda Electronics Technology Co.,Ltd,Beijing 101300,China;3.KunshanGuoli Vacuum Electric Co.,Ltd,Kunshan 215316,China;4.Beijing Vacuum Electronics Research Institute,Beijing 100015,China)

【机构】 北京有色金属研究总院粉末冶金及特种材料研究所； 北京路星宏达电子科技有限公司； 江苏昆山国力真空电器有限公司； 北京真空电子技术研究所；

【摘要】 分别采用传统工艺和新工艺处理了陶瓷金属化用钼粉,并利用激光粒度分析、FESEM、X射线射、金相、扫描电镜、拉伸试验、氦质谱检漏等方法研究了处理前后钼粉的粒度及其分布、颗粒形貌、松装密度、氧含量、相组成,金属化膏层的表面状态,金属化层及界面组织,金属化层的封接强度和气密性。物理性能测试结果表明,新工艺处理钼粉的松装密度明显提高,氧含量增幅明显减小,且无杂相污染。配浆及丝网印刷试验显示,含新工艺处理钼粉的金属化料浆流动性好、固液比高,金属化膏层表面光亮细腻,金属化层致密度高。装管成品拉伸试验表明,含新工艺处理钼粉的金属化层的封接强度提高35%,拉伸后出现断瓷现象;这缘于钼粉容易烧结致密化并形成均匀连通的钼骨架。更多还原

【Abstract】 Molybdenum powder used in ceramic metallization was dispersed by the traditional and advanced processes.Particle size and distribution,granule morphology,apparent density,oxygen content, and phase composition of molybdenum powder before and after processing,the surface state of metallization paste,the microstructure,the sealing strength,and gas tightness of metallization layers were investigated by laser particle analysis,FESEM,XRD,metallographic analysis,SEM,tensile testing,and helium mass spectrometer leak detecting etc.The physical properties analyses show that the molybdenum powder dispersed by the advanced process,are characterized by apparent density increase,far less oxygen content change,and no impurity phases.The pulping and screen printing procedures demonstrate that the flowability and solid-liquid ratio of metallization slurry including the advanced molybdenum powder are improved, the surface of metallization paste is bright and smooth,and the compactness of metallization layer is high.The tensile testing for ceramic vacuum tubes reveals that the sealing strength of metallization layer containing the advanced molybdenum powder increases by 35% and the ceramic tube fracture after the testing, which owe to easy sintering compactness for the molybdenum powder and formation of molybdenum metallic skeletons with homogeneous and connected pores.更多还原