【作者】 陈永生； 卢景霄； 杨仕娥； 郜小勇； 谷锦华；

【Author】 Chen Yongsheng,Lu Jingxiao,Yang Shi-e,Gao Xiaoyong,Gu Jinhua (The Key Laboratory of Materials Physics,Ministry of Education,Zhengzhou University,Zhengzhou 450052,China)

【机构】 郑州大学材料物理教育部重点实验室；

【摘要】 采用自制的超声喷涂热解设备在玻璃基片上沉积了ZnO和ZnO:Al薄膜。研究了沉积温度、Al掺杂浓度对薄膜形貌、透光率、结晶特性的影响。在温度实验中,ZnO和ZnO;Al薄膜的透光率随着沉积温度的升高而迅速增加,并趋于饱和。ZnO薄膜的晶粒生长主要表现为(101)、(002)晶向,且随着温度的升高薄膜结构变的致密;而ZnO:Al薄膜在低温时表现为(002)生长特性,随着温度的升高转变为(101)、(002)和(100)晶向生长。随着溶液中Al含量的增加,ZnO:Al薄膜的透光率降低,电导率先增大后降低,并在溶液中Al:Zn(mol浓度比)为8%时薄膜呈现出强的(002)生长特性。更多还原

【Abstract】 Effects of deposition temperature and mol concentration ratio of Al:Zn in solution on the properties of ZnO and ZnO:Al films deposited on glass by Ultrasonic Spray Pyrolysis method were investigated.The transmittance of films improved first with the increasing of substrate temperature,and got saturation on higher temperature,but decreased with the increasing of Al:Zn ratio in the solution.Two diffraction peaks corresponding to(101) and(002) are observed in all ZnO films.However,ZnO:A1 films deposited at lower temperature shown a preferential orientation of(002),and changed to(101)、(002)和(100) at higher temperature.With the increasing of Al concentration in solution,conductivity of films increased first,and obtained a maximum at Al:Zn=8%..更多还原