【作者】 林清耿； 郜小勇； 冯红亮； 陈永生； 杨仕娥； 谷锦华； 卢景霄；

【Author】 Lin Qinggeng,Gao Xiaoyong~*,Feng Hongliang,Chen Yongsheng,Yang Shie,Gu Jinghua,Lu Jingxiao (The Key Laboratory of Material Physics of Ministry of Education,Zhengzhou University,Zhengzhou 450052)

【机构】 郑州大学物理工程学院材料物理教育部重点实验室；

【摘要】 本文利用中频磁控反应溅射（MF-MS）和直流磁控反应溅射（DC-MS）技术分别在玻璃衬底上首先制备了AZO透明导电薄膜,然后利用5%的氯化铵（NH₄Cl）溶液对制备的AZO薄膜进行表面织构。利用扫描电子显微镜（SEM）和分光光度计分别测量并研究了织构前后薄膜的表面形貌和光学特性。研究结果表明NH₄Cl溶液容易控制MF-MS制备的AZO的表面织构过程,并且可以获得较好的绒面。表面织构后,薄膜在可见光波段的平均反射率急剧的从12%降低到7.86%。而对于DC-MS制备的AZO却没有获得明显的织构表面。从应力和致密度角度对实验结果作了合理解释。更多还原

【Abstract】 Al-doped zinc oxide（AZO） transparent and conductive films were firstly prepared on glass substrate by mid-frequency reactive magnetron sputtering（MF-MS） and direct current reactive magnetron sputtering（DC-MS）,respectively.The surface morphology and optical properties of textured AZO films were investigated systematically by means of scanning electron microscopy（SEM） and UV-VIS-IR spectrophotometer.Subsequently,the as-dep AZO films were textured by 5%NH₄Cl aqueous solution.The results indicate that NH₄Cl aqueous solution can easily control the surface-textured process of AZO films by MF-MS and obtain better surface texture. The reflectivity of the textured AZO films in the visible light range drastically decrease from 12.7%to 7.86%.While AZO films prepared by DC-MS doesn’t show apparent surface texture.The result can be accounted for by comparable stress and compactability.更多还原