【作者】 罗霄； 张学军；

【Author】 Luo Xiao;Zheng Li-gong;Zhang Xue-jun;Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun rlnstitute of Optics,Fine Mechanics and Physics,Chinese Academy of Science;

【机构】 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室；

【摘要】 针对三坐标式轮廓仪测量大口径光学表面精度偏低,测量时间长的问题,本文提出了采用摆臂式轮廓测量结合非接触位移传感器来实现大口径光学表面的高速高精度测量的新方法。摆臂式轮廓仪测量精度只受摆臂转台误差的影响,可以实现很高的测量精度,根据分析,对口径小于Φ1.5m的非球面,测量精度优于1μm PV。同时采用非接触式位移传感器,提高了数据采集频率,缩短了测量时间,从而降低了温度变化对测量精度的影响。最后本文采用摆臂式轮廓仪测量一块1100×800的体育场形球面试验件,测量时间仅为30分钟,采集数据点1200,000个,测量结果与哈特曼的测量结果比对,均方值偏差0.02μm,PV值偏差为0.5μm,具有很好的一致性。更多还原

【Abstract】 A high speed and high accuracy swing-arm profilometer is put forward to replace the traditional three coordinate CMM for large mirrors testing.According to analysis,because the arm rotating run-out is the only error source,high accuracy up lμm PV could be reached within Φ1.5m.By applying a non-contact linear sensor,high sample rate was achieved which could decrease testing time to minimize the thermal effects on profilometry.A mirror of 1100x800 mm sphere was tested by the swing-arm profilometer,and it took only 30 minutes for more than 1200,000 sample points.Comparing to a Shark-Hartmann test,the difference of two testing results is 0.02 um RMS and 0.5μm PV respectively,with very good consistency.更多还原