【作者】 王羽佳； 江竹青； 王喆； 程国锋； 伍江涛；

【Author】 Wang Yujia*,1,2 Jiang Zhuqing1,2 Wang Zhe1,2 Cheng Guofeng1,2 Wu Jiangtao1,2(1 College of Applied Sciences,Beijing University of Technology,Beijing 100124,China)(2 Institute of Information Photonics Technology,Beijing University of Technology,Beijing 100124,China)

【机构】 北京工业大学应用数理学院； 北京工业大学微纳信息光子技术研究所；

【摘要】 本文提出了利用双波长数字全息实现对微光学元件的三维成像。由两个不同波长的激光记录所得到的两幅数字全息图分别通过数值再现得到其对应波长的包裹相位图,再通过双波长解包裹得到等效波长的相位图,由该相位图重构出被测物体的三维形貌。文中首先通过数值模拟验证了双波长数字全息方法的可行性,然后通过搭建双波长数字全息实验系统,利用632.8 nm和671 nm两个波长的激光对微光学元件刻划凹槽进行了三维成像,得到的刻划凹槽平均深度为7.1μm,其结果与表面轮廓测量仪获得的结果具有较好的一致性,表明双波长数字全息应用于微光学元件三维成像是可行和有效的。更多还原

【Abstract】 In this paper,the three-dimensional(3D) profiles of a micro-optical component is obtained by using dual-wavelength digital holography.Two individual phase images are obtained by using two different wavelength,respectively,and the phase image for beat wavelength is obtained after dual-wavelength phase unwrapping.This method is demonstrated by both numerical simulation and experiment.In the experiment,two lasers of the different wavelengths 632.8 nm and 671 nm are used to obtain a larger beat wavelength.The object is a plate with many micro grooves.The result shows that the average depth of the groove is 7.1 μm.This is in good agreement with the result given by the profilometer.It demonstrates that dual-wavelength digital holography is feasible and effective for the 3D imaging of the micro-optical components.更多还原