【作者】 王珏； 涂成厚； 吕福云；

【Author】 Wang Jue1 Tu Chenghou1 Lv Fuyun,1 (1 School of Physics,NanKai University,Tianjian,300071,China)

【机构】 物理科学学院南开大学；

【摘要】 本文研究了利用超短脉冲激光在SF6气体环境下制作硅表面微结构的实验条件和结果。首先我们利用纳秒激光进行了硅表面微结构的加工,通过改变实验参数得到现有条件下的最优化加工结果。随后进行了飞秒激光微加工的实验研究,通过调整参数,得出了最优化的微结构加工结果,柱状微结构高度和间隔均约5m。比较利用两种激光光源制作的微结构形貌可以发现,飞秒激光得到的尺度更小形态更优良,这与飞秒激光本身的特点是分不开的。随后我们利用XPS(X-ray photoelectron spectroscopy)分析微结构表面元素分布,证实了杂质能级的引入,为进一步研究微结构对红外波段光吸收率增强机制奠定了理论基础。更多还原

【Abstract】 We studied and showed how to make micro-structures on the silicon surface utilizing ultra-short laser sources in SF6 atmosphere.Firstly,we used nanosecond laser pulse to fabricate micro-structure,and obtained the best results by optimizing the experimental conditions.Then we used femtosecond laser and obtained the best micro-structure,which is composed of spikes with height and separation of 5 μm.The experimental results showed that the micro-structure made by femtosecond laser has smaller scale and better shape.We used XPS to Analysis the surface element distribution of micro-structure,which confirmed the introduction of impurity level and laid the foundation of quantitative research.更多还原