【作者】 马占龙； 李显凌； 刘健； 王君林；

【Author】 Ma Zhan-long,Li xian-ling,Liu Jian,Wang Jun-lin (The State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun,130033,China)

【机构】 中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室；

【摘要】 超光滑表面在现代光学及微电子学领域的应用愈来愈广泛,相应的超光滑表面加工技术也就成为超精密加工技术的重要组成部分。本文首先介绍了超光滑表面的特点及其材料去除机理,并且对接触式、准接触式和非接触式三种超光滑表面加工方式的优缺点进行了详细的分析对比,进而得出了非接触式为获得超光滑表面的最理想方法。随后本文对现有超光滑表面加工方法进行了归纳总结,详细阐述了各种加工方法的加工原理、加工精度及应用范围。最后作者指出了国内超光滑表面加工技术与国际先进水平相比存在的差距,并分析了超光滑表面加工技术的发展趋势。更多还原

【Abstract】 Super-smoothing surfaces are widely used in the field of optics and microelectronics,and super-smoothing surfaces polishing technology is an important component of super-precision technology.Firstly the characteristic and material removal mechanisms of super-smoothing surfaces are introduced in the paper.The contact,quasi-contact and non-contact super-smoothing surface processing styles are compared,and non-contact style is the best of all.Then the summary of the existing super-smoothing surface polishing technologies is given,and the machining mechanism,precision and application spectrum are expounded.At last,the gap at home and abroad is present,and the trend of super-smoothing surface polishing technology is determined.更多还原