【作者】 王彬； 赖建军； 赵二景； 陈四海；

【Author】 WANG Bin 1,LAI Jian-jun 1,2,CHEN Si-hai 1,2,ZHAO Er-jing 1 (1.Wuhan National Laboratory for Optoelectronics,Wuhan 430074,China) (2.School of Optoelectronic Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China)

【机构】 华中科技大学光电子科学与工程学院； 武汉光电国家实验室；

【摘要】 非制冷红外探测器广泛应用于消防,汽车夜视,监控和军事等诸多领域.而氧化钒非制冷红外探测器具有高电阻温度系数、无需斩波的特点,是一类性能优异的热红外探测器。采用电化学腐蚀多孔硅方法和两种不同流程制备了128元线列氧化钒非制冷探测器,分析了多孔硅牺牲层的反应机理并对两种流程的效果进行了比较.采用黑金工艺制备了宽谱红外吸收层,器件的性能测试表明比探测率达到6×108cmHz1/2W-1。更多还原

【Abstract】 Uncooled infrared bolometer has been widely used in the field of firefighting,driver night vision,surveillance and military.VOx infrared detectors has been widely used in infrared detect market because of its high performance and room temperature operation without cooling system.The porous silicon preparation technology of electrochemical corrosion method with two different processes is adopted to fabricate 128-element linear uncooled infrared detector and the reaction mechanism of porous silicon sacrificial layer is analyzed and the two different processes are discussed.With gold balck technology preparing the wide spectrum infrared absorption layer,the device’s performance test had indicated that the specific detectivity reaches 6×10 8 cmHz 1/2 W-1 。This lays foundation for our future uncooled infrared focal plane arrays.更多还原