【作者】 王伟； 徐敏； 于国域； David D.Walker； 朱虹；

【Author】 Wei Wang 1 Min Xu 2 Guoyu Yu 3 David D.Walker 3 Hong Zhu 1 (1Shanghai Modern Advanced Ultra Precision Manufacturing Center,Shanghai,200433) (2School of Information and Engineering,Fudan University,Shanghai,200093) (3Ultra Precision Surfaces,OPTIC Technium,Ffordd William Morgan,St Asaph Business Park,North Wales,LL17 0JD,UK)

【机构】 上海现代先进超精密制造工程中心； 复旦大学信息科学与工程学院； Ultra Precision Surfaces,OPTIC Technium,Ffordd William Morgan,StAsaph Business Park,North Wales LL170JD UK；

【摘要】 现代科学技术的发展离不开高精度的光学元件,特别是高精度的非球面光学元件。计算机控制光学表面成形技术的出现使得高效率地加工高精度的光学元件成为了现实。而超大口径望远镜技术的提出使人类的光学制造水平面临着巨大的挑战。超大口径望远镜需要由数量巨大的高质量、大口径的光学元件拼接而成。精密气囊抛光技术基于计算机控制光学表面成形技术,采用充气的柔性抛光气囊作为抛光工具,解决了传统计算机控制光学表面成形技术中工具不能很好地和工件吻合的缺点。但是气囊抛光对光学元件边缘质量的控制是个需要和重视的难题。加工中的边缘效应的存在影响着光学元件的最终质量。本文针对气囊抛光的特点分析了产生边缘效应的原因,并针对其形成原因提出了三种解决手段。实验表明采取特殊的去除函数对元件边缘部分抛光是一种行之有效的方法,能取得较好的效果并保证抛光过程的连续性。更多还原

【Abstract】 High-quality optical elements are very important in modern technology;in particular top-quality aspheric optical elements.The concept of an extremely large ground based telescope is a significant technical challenge particularly for the manufacture of the optical components necessary to realize the very demanding performance.Extremely large ground based telescopes require many high-quality,large-diameter optical elements for their construction.The method of optical polishing,using an ultra precise bonnet,is based upon the use of computer controlled fabrication of an optical surface.A bonnet filled with air is used as a precise polishing tool which is flexible and can adapt itself well to the shape of the part,compared with other polishing methods.As with other polishing techniques the edge quality is a key factor affecting the performance of the optical element.In this paper,the effects of edge performance are analyzed,and three compensating techniques are discussed.It is demonstrated that,good edge control can be achieved by using a special removal function applied to the polishing process.Some experimental results are shown and a consecutive polishing process is described.更多还原