【作者】 唐恺； 吴群； 刘敏； 冯子睿； 傅佳辉； 朱淮城；

【Author】 Tang Kai~1 Wu Qun~1 Liu Min~1 Feng Zirui~1 Fu Jiahui~1 Zhu Huaicheng~2 (1 Dept.of Electronic & Communications Engineering,Harbin Institute of Technology,Harbin 150001,China 2 China Aerospace Science & Industry Corp.The Second Academy Institute No.25,Beijing,100854 China)

【机构】 哈尔滨工业大学电子与信息技术研究院； 航天科工集团二院25所；

【摘要】 为满足移相器小型化的要求,分析了基于RF MEMS开关毫米波段移相器的相移特性,提出了在金属桥下添加介质层以提高相移的改进办法,并通过采用锯齿形结构共面波导以抵消添加介质层所引入的反射损耗,提出一种新的模型。在此基础上,利用CST软件对所设计的MEMS移相器的网络特性进行了仿真与分析,结果表明,本文提出的模型具有在2GHz工作带宽内反射损耗小于-10dB,插入损耗在2GHz内大于-2dB,单桥相移量高达22.5度,未封装的移相器总体积减小56%等特点。更多还原

【Abstract】 To satisfy the miniaturization of the phase shifter,the principle of the phase shift of the MEMS phase shifter has been analyzed.The methodology of adding the insulation layer below the MEMS bridge to increase the phase shift has been proposed,and the saw-shaped CPW is used to decrease the return loss introduced by the added insulation layer.Then the net characteristic of the MEMS phase shifter based on this design has been analyzed and simulated by the software CST.The results demonstrate that the proposed model has a return loss less than -10dB and the insertion loss more than -2dB during 2GHz bandwidth,the phase shift of one bridge can reach 22.5 degree and the size of the naked chip is reduced by about 56%.更多还原