【作者】 谢红云； 张蔚； 何莉剑； 杨华； 王扬； 沙永萍； 甘军宁； 张万荣；

【Author】 Xie Hongyun~1,Zhang Wei~1,He Lijian~1,Yang Hua~2,Wang Yang~1, Sha Yongping~1,Gan Junning~1,Zhang Wanrong~1 1 College of Electronic Information and Control Engineering,Beijing University of Technology 2 School of Electric and electricial Engineering,Nanyang Technological University,Singapore

【机构】 北京工业大学电子信息与控制工程学院； 新加坡南洋理工大学电子与电气工程学院；

【摘要】 为满足10Gbit/s光纤通信系统光电器件的封装要求,本文给出了三种不同硅衬底上微波共面波导(Coplanar Waveguide,CPW)的设计和制备,包括普通的低阻硅(Low Resitivity Silicon,LRS),带有3um厚二氧化硅介质层的低阻硅和高阻硅(HRS)衬底。通过设计共面波导的纵向和横向结构参数,使其具有50U的特性阻抗.模拟和实验结果表明,制备于低阻硅上的共面波导因很高的损耗不适合用于高频微波信号的传输;在低阻硅衬底和共面波导传输线间加入氧化介质层能有效地降低损耗,但要求氧化介质层足够厚:直接制备于高阻硅衬底上的共面波导,在设计的波导尺寸条件下,在26GHz的范围内损耗保持在2dB/cm,可满足10Gbit/s光通信系统对信号传输的要求。更多还原

【Abstract】 Three kinds of coplanar waveguide were designed and fabricated on the different silicon substrates,including low-resistivity silicon substrate(LRS),LRS with 3μm silicon oxide interlayer and high-resistivity silicon substrate(HRS).The results show that microwave loss of CPW on LRS was too high to be used,but it can be reduced largely by the interlayer of silicon oxide added between the CPW transmission lines and the LRS when the thickness of the interlayer was enough.The CPW directly on HRS shows the loss as low as 2dB/cm at the range of 0~26GHz,which proves more suitable to be used as the CPW transmission line in the packaging of optoelectronic device,such as EAM used in the 10Gbit/s optical fiber communication system.更多还原