【作者】 刘云； 王焱； 黄佐华；

【Author】 Liu Yun Wang Yan Huang Zuohua(School of Physics and Telecommunication Engineering,South China Normal University,Guangzhou 510006,China)

【机构】 华南师范大学物理与电信工程学院；

【摘要】 分析位相物体干涉测量与扫描成像系统存在的问题,通过引入小焦距成像透镜,明显减少系统的长度,改善位相测量稳定性;同时提出获取干涉条纹周期及其位移的极值间距算法,提高位相测量与成像的速度。改进后系统的位相测量分辨率达π15~π25,测量范围达0~2π,测量位相重复性精度约1%,成像质量有所提高。更多还原

【Abstract】 Problems of the interference measurement and scanning imaging system for phase object have been analyzed.By adding a len with short focus,the length of the system is shortened obviously and the stability of measuring the phase is improved.Besides a new extreme spacing algorithm is introduced to calculate the interference fringe period and its shift.This speeds up the measurement and imaging process.The phase measurement resolution of the improved system can reach1 15 ~ 1 25 π.It has a phase measuring range of 0 ~ 2 π and repeatability of 1%.The quality of phase imaging is also advanced.更多还原