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球形纳米In2O3材料气敏元件制作及对甲醛气敏性能的研究
The preparation and formaldehyde sensing property of nanoball In2O3 gas sensor
【Author】 Chen Xingru Wang Jing Yao Pengjun (School of Electronic Science and Technology,Dalian University of Technology,Dalian,Liaoning,116023,China)
【机构】 大连理工大学电子科学与技术学院;
【摘要】 采用水热合成法制备了球形纳米In2O3材料,通过X射线衍射(XRD)和扫描电镜(SEM)对材料进行了表征。将球形In2O3与CdO材料按照摩尔比1:1混合制作气敏元件,测试了元件对甲醛气体的敏感性能,元件的最佳工作温度约为170℃。该气敏元件不仅对甲醛的响应高,而且具有选择性好的特点。
【Abstract】 Nanoball In2O3 was synthesized by a hydrothermal process.The powders were characterized by X-ray diffraction(XRD) and scanning electron microscopy(SEM).The gas sensors based on In2O3 mixed with CdO (1:1 in molar ratio) were prepared and the response properties to formaldehyde were investigated,the best working temperature is about 170℃.It was found that the sensors have high response and satisfactory selectivity to formaldehyde.
- 【会议录名称】 第八届全国信息获取与处理学术会议论文集
- 【会议名称】第八届全国信息获取与处理学术会议
- 【会议时间】2010-08-06
- 【会议地点】中国山东威海
- 【分类号】TP212.2
- 【主办单位】中国仪器仪表学会