【作者】 成永军； 李得天；

【Author】 Cheng Yongjun Li Detian (Lanzhou Institute of Space Technology Physics Lanzhou 730000 China)

【机构】 兰州空间技术物理研究所；

【摘要】 磁悬浮转子规和电容薄膜规被用作真空标准之间国际比对的传递标准。为了减小由于人工操作和读数等引起的测量不确定度,利用虚拟仪器技术开发了磁悬浮转子规和电容薄膜规的数据采集与控制系统,并将其应用于分压力质谱计校准之中,实现了四极质谱计的精确校准。更多还原

【Abstract】 The spinning rotor gauge(SRG) and capacitance diaphragm gauge(CDG) are used as vacuum transfer standard for international comparison.For decreasing the uncertainties of man-made,a data acquisition and control system of SRG and CDG was developed based on virtual instrument technology.With the data acquisition and control system,a virtual instrument system of partial pressure mass spectrometer calibration was realized to calibrate quadrupole mass spectrometer precisely.更多还原