【作者】 陈怡儒； 闫卫平； 李鑫； 徐迎华；

【Author】 Chen Yiru Yan Weiping Li Xin Xu Yinghua (Department of Electronic Engineering Dalian University of Technology Dalian 116024 China)

【机构】 大连理工大学电子与信息工程学院；

【摘要】 提出了双腔并联式无阀压电微泵结构,采用有限元法对硅基压电微泵的结构参数和流动特性进行了分析。研究结果表明:PDMS泵膜的厚度对流速有较大影响,泵膜越薄流速越大;利用大角度收缩/扩散管分析得到压强和雷诺数的关系,最佳的管长与小口直径之比约为1.9;单泵整体仿真分析与实验结果吻合较好。更多还原

【Abstract】 The construction of a novel valveless piezoelectric micropump in parallel with double chambers is proposed,and the structural parameters of the pump are optimized and characteristics of microflow in the pump are analyzed.It shows that:the thickness of PDMS membrane has an influence on the flow rate,and the flow rate is higher when the membrane is thinner;the results about Reynolds number and pressure distribution were obtained by analyzing,and the best performance of the pump is proved appearing when the radio between the diffuser length and the smallest channel diameter is about 1.9;and both results of simulation and experiment are compared and analyzed.更多还原