【作者】 马修水； 钟伟红； 关宏伟； 闫如胜； 费业泰；

【Author】 Ma Xiushui~1 Zhong Weihong~1 Guan Hongwei~1 Yan Rusheng~2 Fei Yetai~3 (1 Ningbo Institute of Technology Zhejiang University Ningbo 315100 China;2 ZTE Corporation Shenzhen 518057 China; 3 Hefei University of Technology Hefei 230009 China)

【机构】 浙江大学宁波理工学院； 中兴通讯； 合肥工业大学；

【摘要】 由两组光栅副形成的一次莫尔条纹干涉形成二次莫尔条纹,通过对二次莫尔条纹信号处理和细分,可实现纳米级测量精度,其中,二次莫尔条纹质量对纳米光栅传感器质量有重要的影响。本文基于Lighttools软件对形成二次莫尔条纹信号能量进行仿真,找出二次莫尔条纹信号的变化规律,为后续信号处理和电子细分电路设计提供理论模型。更多还原

【Abstract】 Two groups of gratings produce two groups of first order Moire fringe.These two groups of first order Moire fringe interfere and produce second order Moire fringe.We can achieve nanometer measurement accuracy by the processing and subdivision of second order Moire fringe’s singal.And the second order Moire fringe’ quality is very important for the quality of nano-grating.This paper simulates the signal energy of second order Moire fringe based on the Lighttools software.By the simulation,the change rule is finded,theoretical model for the follow-up signal processing and electronic subdivision circuit design is provided.更多还原