【作者】 刘意杨； 王越超； 于鹏； 席宁； 董再励；

【Author】 Liu Yiyang~(1,2) Wang Yuechao~1 Yu Peng~1 Xi Ning~1 Dong Zaili~1 (1 State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences Shenyang 110016 China 2 Graduate School of the Chinese Academy of Sciences Beijing 100049 China)

【机构】 中国科学院沈阳自动化研究所机器人学国家重点实验室； 中国科学院研究生院；

【摘要】 为了完成一种新颖的亚μN(micro Newton)微力传感器的开发,使其具有可靠的、高精度的微力反馈信息。本文设计出相应的信号处理方法并提出了一种新颖的间接标定方法。该方法首先建立传感器末端受力产生的偏移量与施加的微力之间的关系模型,然后在该模型的基础上,通过给传感器输入标准的偏移量,间接得到标准微力,从而解决了微力传感器的标定难以寻找标准力源的问题。本文最后完成了对微力传感器所受的微力与输出电压之间的关系模型的标定。实验结果表明本文开发的信号处理电路是合理的,标定方法是正确的,有效的。本文设计的信号处理方法及新颖的标定方法为亚μN微力传感器的研究奠定了基础,从而为微装配和微操作中微接触力的反馈控制提供了可靠的解决方法。更多还原

【Abstract】 To develop a novel micro-force sensor that can reliably measure force in the range of sub-micro-Newton(μN),the signal processing method and a novel indirect calibration method are designed and realized in this paper.The relationship model between the micro-force acting on the sensor’s probe tip and the deflection of the probe tip is built up.With the above model and the standard deflection input,the novel indirect calibration method completes calibrating the relationship model between the micro-force and the output voltage of the sensor and solves the problem that standard micro-force used in calibration is difficult to find.Experiment results show the signal processing method and the new indirect calibration method are effective and correct.The signal processing method and the indirect calibration method are indispensable to developing the sub-μN micro-force sensor and providing a feasible and versatile solution in micro contact-force sensing and feedback control for micro/nano assembly and manipulation.更多还原