【作者】 张杨； 康崇； 王庆涛； 成雷； 郑彩平； 杨月芳；

【Author】 ZHANG Yang,KANG Chong,WANG Qing-tao, CHENG Lei,ZHENG Cai-ping,YANG Yue-fang (College of Science,Harbin Engineering University,Harbin 150001,China)

【机构】 哈尔滨工程大学理学院；

【摘要】 目前芯片级的磁场传感器越来越受到关注。本文设计一种基于MEMS的激光铯磁力传感系统,即将系统垂直地叠加在一个硅芯片上,用垂直腔表面发射激光器泵浦一个玻璃和硅基之间的铯吸收室,如外界有磁场,即便是非常微弱,这些原子的阵列也会发生变化,通过光泵磁共振即可探测磁场的信息。文中给出了MEMS铯激光磁力传感系统的理论分析和系统设计,对粒子数的跃迁过程进行了计算和研究。相信芯片级的磁场传感器将具有广泛的应用前景。更多还原

【Abstract】 The magnetic field sensor chip is paid more and more attention.This paper designs a laser cesium magnetic sensing system based MEMS.The system will be stacked vertically on a silicon chip,with the vertical cavity surface emitting laser to pump the absorption chamber between glass and silicon.If it has magnetic field outside,even very weak,these atoms array will change and magnetic field information can be detected by optical pumping.The paper gives the laser magnetic MEMS sensor system of analysis and system design and the transition process of the particles were calculated and studied.We believe that the magnetic field sensor chip will have a wide range of applications.更多还原