【作者】 陈强； 李晶； 张继红； 高连山；

【Author】 Qiang Chen, Jing Li, Ji-hong Zhang, Lian-shan Gao Beijing Institute of Radio Metrology and Measurement , Beijing, China

【机构】 北京无线电计量测试研究所；

【摘要】 扫描电子显微镜/X射线能谱(SEM/EDS)组合分析方法在很多领域中有着广泛的应用。本文介绍了X射线能谱分析中能谱的形成和原理,以及应用X射线能谱分析方法对氢原子频标中钛丝吸气剂的表面洁净度进行检测的技术应用。选取了4个钛丝样品,在不同的外协单位进行表面处理,然后对4个钛丝样品的表面进行了检测,对样品的光滑面和背面的褶皱面进行了观测,从视场中可以看到钛丝表面的宏观情况;在每个视场中选3～4个有代表性的区域点进行电子能谱分析,给出了每个区域内各元素的电子能谱谱图,得出了所选区域内元素的种类和含量,根据元素守恒定律,对引入杂质元素的可能来源进行分析,并由此提出了改进措施,进一步优化了吸气剂的制造工艺。更多还原

【Abstract】 Scanning Electron Microscopy (SEM)/Energy Dispersive X-ray Spectroscopy (EDS) combined analysis method is widely used in many areas. In this paper, formation and principle of energy spectrum were introduced. The SEM/EDS combined method had been used to inspect the cleanness of the surface of the getters in hydrogen atomic clock. Four titanium thread samples were sent to four different companies to do the surface cleaning. The slippery surfaces and the wrinkly surfaces of the four titanium thread samples were inspected. A picture of the sample surface is captured through the ocular. The X-ray photoelectron spectroscopies had been done in the three or four spot areas chosen in the picture. The spectroscopy graphs of all the elements in the spot area were given. The category and the content of the elements were given too. According to the element conservation law, the possible sources of the impurity elements are analyzed, and the improved methods were proposed to optimize the manufacture technology of the getters.更多还原