【作者】 孙斌； 张涛；

【Author】 SUN Bin;ZHANG Tao;Xi’an University of Science and Technology,college of science;

【机构】 西安科技大学理学院；

【摘要】 近年来,基于压电多层膜结构声表面波器件得到了广泛的关注和研究,尤其在电予工程及通信技术等领域得到广泛应用。本文研究基于多层膜的声表面波器件传播理论,介绍了声表面波场理论的声表面波传播特性的主要计算方法,包括传递矩阵法,表面阻抗法,刚度矩阵法,频散方程以及声表面波的激励方式等。通过对基于多层膜的声表面波传播理论研究的分析与总结,介绍并讨论了目前国际基于多层膜的声表面波器件的理论研究现状及进展。更多还原

【Abstract】 In recent years,SAW devices based on piezoelectric multilayer structure has been widely paid attention and researched,especially in the field of electronic engineering and communications technology.In this paper,the propagation theory of SAW based on the multilayer film has been researched,introduced the calculation of the characteristics of SAW based on the SAW field theory,including the transfer matrix method,the surface impedance method and the stiffness matrix method,and the dispersion equation,and the incentive method of SAW.By analysis and summary the propagation theory of SAW based on the multilayer film,the current international research status and progress of SAW devices based on the multilayer film is introduced and dicussed.更多还原