【作者】 吉小军； 范彦平； 韩韬； 蔡萍；

【Author】 JI Xiao-jun,FAN Yan-ping,HAN Tao,CAI Ping (School of Electronic Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai 200240,China)

【机构】 上海交通大学 电子信息与电气工程学院；

【摘要】 中文摘声表面波传感器的性能在很大程度上取决于制作延迟线或谐振器的压电基片。从声表面波压力传感器设计角度出发,系统性的提出了其敏感基片优化选择的基本准则。对各个准则的定义、含义和分析方法进行了详细说明。并以基于硅酸镓镧的声表面波压力传感器优化设计为例,对敏感基片切向进行了分析和优化选择。论文工作对声表面波压力传感器的优化设计具有一定的指导意义。更多还原

【Abstract】 The properties of SAW sensor depends on the piezoelectricity substrate with delay line or resonator in great degree.Some basic criterions have been proposed systematically fort the optimal selection of sensitive substrate for the design of SAW pressure sensor.The definition,meanings and analysis methods have been explained detailed As an example,the optimal cuts for SAW pressure sensor based on langasite(LGS) have been analyzed and proposed.The work of this paper has some guidance meanings for the design of SAW pressure sensor.更多还原