【作者】 胡睿； 罗顺忠； 杨玉青； 钟正坤； 王关全； 刘业兵；

【Author】 Hu Rui,Luo Shun-zhong,Yang Yu-qin,Wang Guan-quan,Liu Ye-bin,Zhong Zheng-kun (Institute of Nuclear Physics and Chemistry,China Academy of Engineering Physics,Miyanyang 621900,China)

【机构】 中国工程物理研究院核物理与化学研究所；

【摘要】 多孔硅的高比表面积对研发性能优良的微小型器件具有重要意义。研制高转换效率的镍-63微型同位素电池,是多孔硅将核技术与微能源技术相结合的一个极具前景的应用方向。本文从高厚径比的多孔硅材料出发,介绍了溶液超声法、悬浮液超声法以及电镀法这三种镍粒子加载方法的工作原理。初步实验结果表明,电镀法加载的镍粒子在孔中密实、均匀、填充率高,是其中较为可行的技术路线。并指出今后在多孔硅上开展电镀法加载镍的工艺条件研究中,尚需要从光亮剂、整平剂、电流密度等多方面予以着重考虑。更多还原

【Abstract】 Porous silicon(PS) with height diameter/thickness ratio possesses significance in the field of developing micro-devices with excellent properties.Used in preparing nickel-63 isotope microbatteries, PS combines nuclear techniques with micro-energy technologies.It has a vast application prospect.Three incorporation methods,such as ultrasonic method in solution,ultrasonic method in dispersion system,and electrodeposition.method,were presented.The preliminary experimental results showed that nickel particles were electroplated tightly,homogeneously and efficiently into PS.It was pointed as a feasible technology of incorporation.When developing the work of electrodeposition of nickel on PS,should consider the influence of brightener,leveler,current density and so on.更多还原