节点文献
基于光电位移检测的振动测量控制技术
Investigation for vibration measurement and control based on photoelectric displacement detection
【Author】 Zhang Daxing~1 Jia Wei~2 Guan Bolin~1 (1 School of Mechano-Electronic Engineering,Xidian University,Xi’an 710071,China; 2 Xi’an New Postcom Equipment Co.,Ltd,Xi’an 710071,China)
【机构】 西安电子科技大学机电工程学院; 西安新邮通信设备有限公司;
【摘要】 位置敏感探测器(Position Sensitive Detector,PSD)是一种基于半导体表面阻抗特性原理的连续性光电半导体位移检测器件,具有位置分辨率高和响应速度快等优点。采用PSD进行非接触振动测量,既不会影响被测对象的振动特性,又能有效避免传统加速度传感器超低频振动测量时的漂移问题,克服了需要速度、位移作为反馈或前馈控制量时所带来的积分相位漂移和频响带宽下降等缺点。本文设计了基于PSD的振动检测及控制系统,详细分析了影响测试性能的主要因素并提出了解决方法。基于设计的测量系统,进行了振动检测及控制实验,实验结果验证了该测量方法的有效性。
【Abstract】 Position Sensitive Detector(PSD) is an optoelectronic position sensor utilizing photodiode surface resistance.Unlike discrete element detectors such as CCD,PSD provides continuous position data and features high position resolution and high-speed response.It especially has high precision of detecting low frequency vibration.It will not affect the vibration performance of test object using PSD.It can provide not only the displacement but also the velocity of the vibrant object,which overcomes the shortages of acceleration sensors and improves the real-time character of the system.The vibration detection and control system is established based on PSD.The key effect factors of detection performance and the solutions were analyzed in detail.The experiments of vibration detection and control were also carried on the surveying system,and the validity of this measuring method is validated based on experimental results.
【Key words】 Position Sensitive Detector; vibration; no-contact; detection;
- 【会议录名称】 2009安捷伦科技节论文集
- 【会议名称】2009安捷伦科技节
- 【会议时间】2009-04-03
- 【会议地点】中国上海
- 【分类号】TH825
- 【主办单位】电子测量与仪器学报杂志社、安捷伦科技有限公司