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一种研究石英基板上声表面波特性的新方法

Temperature Characteristics of Surface Acoustic Waves on Quartz Substrates under Thermally Induced Initial Deformations

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【作者】 公勋于小利陈建军吴浩东毛一葳章德

【Author】 GONG Xun,YU Xiao-li,CHEN Jian-jun,WU Hao-dong,Mao Yi-wei,Zhang De (Key Laboratory of Modern Acoustics(Nanjing University),Ministry of Education,Institute of Acoustics,Nanjing University, No.22,Hankou Road,Nanjing,Jiangsu Province,210093,China)

【机构】 南京大学声学研究所近代教育部重点实验室

【摘要】 通常来说,研究表面波的温度特性时,首先要考虑环境温度变化引起的尺寸变化,然后再通过引入弹性和压电常数的温度系数来进行分析。实际上,使用的材料常数的温度系数参考了变化的依赖环境温度的基板的均匀形变状态。因此,在非均匀形变基板上,这些温度系数就失效了。P.C.Y.Lee和Y.K.Yong依据叠加于静态形变上的动态波动理论[J.Appl.Phys.Vol.60,No.7,p.2327,0ct 1,1986]给出了石英弹性常数的一阶、二阶温度系数。本文利用Lee的理论分析了热形变石英基板上声表面波的传播特性,主要是温度特性。其结果和以前的方法符合得很好,说明了Lee的方法的有效性。由于该方法的一般性,它还能够用来处理常规方法无能为力的非均匀形变基板上声表面波的传播特性。

【Abstract】 Conventionally,when temperature characteristics of surface acoustic waves(SAW) are investigated,the dimensional change due to an environmental temperature change is first considered and then the temperature derivatives of the elastic and piezoelectric constants are introduced to analyze it.However,the used temperature derivatives of the effective elastic constants are referred to the variable temperature-dependent intermediate state rather than the fixed reference state,to which the fundamental elastic constants are referred.Since the used temperature derivatives are not with respect to the fundamental elastic constants,they cannot conveniently be employed in some situations.P.C.Y.Lee and Y.K.Yong[J.Appl. Phys.Vol.60,No.7,p.2327,Oct 1,1986]gave the first order,the second order and even the third order temperature derivatives for the elastic constants of quartz based on the theory of small dynamic fields superposed on the static deformations.Lee’s results are used to analyze the temperature characteristics of surface acoustic waves on quartz substrates. The method is proved to be effective.Owe to the generality of this method,it can be used to deal with more complex situations where the conventional method doesn’t work.

【基金】 基金项目名称:TeO2/36°Y-X LiTaO3结构上零温度系数Sezawa波特性的实验研究(No.10974094)
  • 【会议录名称】 2010’中国西部声学学术交流会论文集
  • 【会议名称】2010’中国西部声学学术交流会
  • 【会议时间】2010-08
  • 【会议地点】中国云南腾冲
  • 【分类号】TB52
  • 【主办单位】陕西省声学学会、上海声学学会、中国声学学会物理声学分会、中国声学学会超声电子学分会、四川省声学学会、重庆声学学会
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