【作者】 张静； 张维佳； 赵而敬； 沈燕龙； 杨东杰； 林军； Havugimana Jean Jacques；

【Author】 ZHANG Jing,ZHANG Wei-jia,ZHAO Er-jing,SHEN Yan-long,YANG Dong-jie, LIN Jun,Havugimana Jean Jacques (School of Physics and Nuclear Energy Engineering,Beihang University,Beijing 100191,China)

【机构】 北京航空航天大学物理科学与核能工程学院；

【摘要】 以硝酸、高纯锌、硝酸铝、尿素为原料,采用均匀沉淀法制备掺铝氧化锌（AZO）粉末,借助769YP-24B型压片机预制AZO陶瓷靶坯体,经常压高温烧结成高致密度、高导电性的AZO陶瓷靶。运用XRD、SEM、电阻率仪等测试手段对制得的AZO粉末和AZO陶瓷靶的形貌结构及电学等性能进行表征。研究结果表明,AZO粉末晶粒大小均匀,平均粒径大小为60nm,AZO靶材的电阻率为2.14×10^-3Ω·cm,相对密度达到98.61%。更多还原

【Abstract】 Aluminum and zinc oxid（AZO） powders were prepared by uniform precipitation method from nitrate, high purity zinc,aluminum nitrate（Al（NO₃）₃） and urea.AZO claybody were made by tablet-pressing machine of 769YP-24B.AZO targets with high relative density and high conductivity were obtained by atmospheric pressure sintering.The morphologies,microstructure,and electrical property of the AZO nanoparticles and targets were characterized by XRD,SEM and resistivity meter.The results show that the average size of AZO crystal is 60nm,the resistivity of AZO target is 2.14×10^-3Ω·cm,and the relative density of target is up to 98.61%.更多还原