【作者】 魏强； 刘圣贤； 王丹； 刘海；

【Author】 WEI Qiang~1,LIU Sheng-xian~1,WANG Dan~1,LIU Hai~2 (1.Tianjin Key Laboratory of Composite and Functional Materials,School of Materials Science and Engineering,Tianjin University,Tianjin 300072,China; 2.Space Materials and Environment Engineering Laboratory,Harbin Institute of Technology,Harbin 150001,China)

【机构】 天津大学材料科学与工程学院天津市材料功能与复合化重点实验室； 哈尔滨工业大学空间材料与环境工程实验室；

【摘要】 采用溶胶-凝胶法在JGS1石英玻璃基上制备了透明ITO薄膜。在模拟空间真空热环境下,分别采用原子力显微镜(AFM)、X光衍射仪(XRD)、X射线光电子能谱(XPS)及分光光度计研究了100keV质子辐照对透明ITO薄膜的微观机制与光学性能的影响。实验结果表明,质子辐照作用使ITO薄膜晶粒尺寸和粗糙度减小,表面基本成分及价态没有发生改变,所引起ITO薄膜光学透过率降低程度也不十分明显。本文工作有助于空间辐射环境下ITO薄膜性能演化规律的研究。更多还原

【Abstract】 The ITO thin films were deposited on JGS1 quartz substrate by a sol-gel method.Under the environment of vacuum and heat sink,the micromechanism and optical properties of transparent indium tin oxide (ITO) thin films were analyzed by AFM,XRD,XPS and spectrophotometer after proton radiation with 100 keV.The experimental results showed the grain size and roughness diminished,the composition and valence of ITO thin films did not change,and the optical transmittance decrease for the ITO thin films was not obvious. The studies about the radiation effect on ITO thin films will help to predict the performance evolution under space radiation environment.更多还原