【作者】 刘璨； 兰惠清； 王洋；

【Author】 LIU Can,LAN Hui-qing,WANG Yang (School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong University, Beijing 100044,China)

【机构】 北京交通大学机械与电子控制工程学院；

【摘要】 硅掺杂的类金刚石(Si-DLC)薄膜能明显改善DLC膜在潮湿空气和高温下的性能,具有很好的工业应用前景。评述了含硅类金刚石膜的研究进展,详细介绍了其制备方法,以及含硅量对其微观结构、硬度和摩擦系数的影响及其机理,为今后的研究工作提供参考和依据。更多还原

【Abstract】 Si-containing diamond-like carbon(Si-DLC) films can improve wear performance in humid atmospheres and at higher temperature significantly,which has a promising outlook in the industrial application. Therefore,the progress in Si-DLC films is reviewed in this paper.Its deposition techniques,the effect of Si content on the microstructure,hardness and friction coefficient and its mechanisms are introduced in a detail. This is a good reference and basis for the future research works.更多还原