【作者】 姚宁； 王执乾； 邢宏伟； 李全友； 秦玉华； 张兵临； 王英俭；

【Author】 YAO Ning~(1,2),WANG Zhi-qian~2,XING Hongwei~2,LI Quan-you~2, QIN Yu-hua~2,ZHANG Bing-lin~2,WANG Ying-jian~1 (1.Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China; 2.Materials Physics Laboratory of Education Ministry of China,and Department of Physics, Zhengzhou University,Zhengzhou 450052,China)

【机构】 中国科学院安徽光学精密机械研究所； 郑州大学物理工程学院材料物理教育部重点实验室；

【摘要】 以镀有Ti层的Al₂O₃为衬底,在微波等离子体化学气相沉积系统中,以CH₄和H₂为反应气体,快速制备了碳纳米管薄膜（沉积时间仅1min）。通过SEM、TEM和Raman光谱观察了薄膜的表面形貌,分析了薄膜的微观结构。结果表明,高密度、分布均匀、缺陷多、锥形的链状碳纳米管在衬底上生长。在高真空室中测试了薄膜场发射特性,其开启电场为1.66V/μm,在3.33V/μm电场下,其场发射电流密度达到4.0mA/cm²,发射稳定,是一种比较有前途的场发射冷阴极材料。更多还原

【Abstract】 Chain-like carbon nanotubes（CNTs） film was rapidly prepared on the titanium-coated ceramic substrate by using the microwave plasma enhanced chemical vapor deposition（MPCVD） system with the reactive gases of CH₄ and H₂.Prior to deposition,the substrates were grinded with SiO₂ powder with Fe dopant.the mixture gas of methane（CH₄） and hydrogen（H₂） was introduced into the chamber.The flow rates of CH₄/H₂ were controlled at 14/100mL/min by mass flower,respectively.The total pressure in the chamber was kept at 6.2kPa during the deposition.The microwave power of 1700W,worked at a frequency of 2450MHz,was applied during deposition.The deposition time was only 1min.The surface morphology and microstructures has been observed by SEM,TEM and Raman spectrum.The chain-like nano-tubes randomly distributed on the substrates. The nano-tubes are multi-wall with diameter of about 30-50nm.The field emission characteristics in high vacuum chamber were measured.Its turn-on electric field was 1.66V/μm.A current density of 4.0mA/cm² was obtained at electric field of 3.33V/μm.The results revealed that the as-deposited CNTs could be a good kind of field electron emitter.更多还原