【作者】 景欣； 沈安文； 梁向辉；

【机构】 华中科技大学控制科学与工程系；

【摘要】 本文介绍了提高激光扫描测量系统检测精度的设计方法。通过选择合适激光源、转镜、透镜组成激光扫描光路,采用DSP和CPLD为核心的信号处理电路,设计校对标准柱和补偿算法,来提高系统的整体测量精度。实验结果表明系统可以达到±3μm的测量精度。更多还原

【Abstract】 This paper is concerned with the improvement of the precision of a laser-scanned measuring system from three aspects of system design. Firstly,the scanning optical system is designed by employing semiconductor laser source,multi-surface rotating mirror,and F-THETA lens. Secondly,the hardware circuit for signal processing is constructed by DSP and CPLD. Thirdly,a calibration pole and an equalizing algorithm are proposed. The experimental results verify that the measuring precision of can be achieved by the designed system.更多还原