【作者】 李小鹏； 黄瀛； 韦小凤； 何欢； 符跃春； 沈晓明；

【Author】 Li Xiao-peng,Huang Ying,Wei Xiao-feng,He Huan,Fu Yue-chun,Shen Xiao-ming (College of Material Science and Engineering,Guangxi university,Nanning 530004,China )

【机构】 广西大学 材料科学与工程学院；

【摘要】 采用脉冲激光沉积法(PLD)在玻璃基片上沉积掺铝氧化锌(AZO)薄膜,通过改变制备工艺中的氧气分压,对AZO薄膜的晶体结构、表面形貌和光学性能进行了研究。结果表明,当氧气分压为0.8Pa时,AZO薄膜沿(002)面择优取向生长,具有最好的结晶质量,薄膜表面平整且结构致密,并且呈现出排列均匀的纳米晶粒。同时发现,随着氧气分压从0.2Pa升高至8.0Pa,AZO薄膜的紫外吸收边逐渐向长波方向移动。而在可见光范围内,氧气分压对AZO薄膜在可见光区透射率影响不大,透射率均在80%以上。更多还原

【Abstract】 Pulsed-laser deposition(PLD) was used to deposit AZO thin films on glass substrates,and we investigated the crystalline structure,surface morphology and optical properties of AZO thin films by changing the condition of oxygen partial pressure in the preparation process.The results showed that AZO thin films grew along with preferential orientation(002) and had optimal crystalline quality when oxygen partial pressure kept in 0.8Pa,;in addition,the films had smooth surface and compacted structure and nanocrystalline grains disposed evenly on the surface of films.It also can be found that the ultraviolet absorption edge moved to the long wave with the increase of oxygen partial pressure from 0.2 Pa to 8.0Pa. Oxygen partial pressure had little influence on the transmittance of AZO thin films in visible light region and the transmittance of all the AZO thin films is above 80%.更多还原