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偏压对45钢等离子渗氮行为的影响

Effect of substrate bias voltage on plasma nitriding behaviour of AISI 1045 steel

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【作者】 王亮李杨张丹丹王春华沈烈

【Author】 Wang Liang;Li Yang;Zhang Dan–dan;Wang Chun–hua;Shen Lie;Department of Materials Science and Engineering,Dalian Maritime University;

【机构】 大连海事大学材料科学与工程系

【摘要】 在直流脉冲等离子体渗氮炉内放置一由双层圆筒组成的活性屏,双层圆筒与阴极相接,由于其直径不同可以产生空心阴极放电。将45钢试样放置在活性屏内,一组试样处于悬浮状态,另一组试样施加负偏压(-50~-150V),同时在400~550℃下进行离子渗氮处理。并用金相显微镜、XRD和显微硬度计对渗氮层进行对比分析。结果表明:偏压显著影响渗氮层的组织结构和性能。偏压试样渗氮层与悬浮试样相比,具有更厚的化合物层,表面硬度更高,扩散层更厚。

【Abstract】 A series of experiments have been conducted on AISI 1045 steel using a hollow cathode discharge-assisted plasma nitriding apparatus with the aim of elucidating the role of substrate bias voltages in plasma nitriding process.Treatments were carried out in NH3 atmosphere of 100 Pa for 4 h at temperatures ranging from 400 to 550 oC.The samples were characterized by optical microscopy,X-ray diffraction and microhardness measurement.The effects of voltage bias on the phase formation,microstructure and hardness of the samples were also studied by setting the voltage to 0,-50,-100 and-150 V.The results showed that the microstructure and phase constituents of the nitride layers were strongly influenced by the bias voltages.It can be seen that there is higher hardness with a thicker nitrided layer on the biased sample.

  • 【会议录名称】 第八届全国表面工程学术会议暨第三届青年表面工程学术论坛论文集(四)
  • 【会议名称】第八届全国表面工程学术会议暨第三届青年表面工程学术论坛
  • 【会议时间】2010-04-25
  • 【会议地点】中国北京
  • 【分类号】TG156.82
  • 【主办单位】中国机械工程学会表面工程分会
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